How does MEMS p...

  • 2022-10-18 14:20:30

How does MEMS pressure sensor develop control performance and play process?

As a large-scale integrated electronic component manufacturer, TDK's products have an advantage, which is also a common advantage of many large Japanese companies, that is, forming a closed loop from upstream raw materials to downstream finished products. Just like TDK's Minicell series, the accuracy is extremely high in the temperature range of -25°C to 85°C, and the error is controlled within ±1%FS (full scale).

In recent years, advances in robotics have facilitated process upgrades in manufacturing plants. Concepts such as automated factories, digital factories, smart factories, black light factories, etc. make it impossible to distinguish what a manufacturing factory under these new names will look like. In fact, despite the implications of these concepts, their ultimate goal is to increase the efficiency of factories and workshops. All upgrades are impossible if unmanned and automated do not lead to greater efficiency.

Most of these upgrade and transformation scenarios require the use of automated equipment. In a smart factory, smart devices are inseparable from various sensors. Sensors can monitor and manage manufacturing equipment, systems, pumps, motors, and more in real-time, as well as monitor trends in factory facilities and employees. This prevents machine breakdowns and improves product quality and productivity. In addition, the collected data can be consolidated and analyzed to further optimize plant operations. To enable this digital transformation in manufacturing, a variety of sensors are key, such as small, high-precision pressure sensors and networkable transmitters.

MEMS pressure sensors are not an odd topic. There are so many devices in factories that require liquids or gases to power them. In order to achieve accurate control of the equipment and save energy, it is crucial to configure the AD9864BCPZRL pressure sensor in the equipment. By using sensors to accurately monitor and control the pressure of these liquids and gases, unnecessary energy consumption can be reduced, thereby improving production efficiency and product quality. There are many products on the market for such sensors. In this installment, we'll see how this very mature market is developing through some collections that I think are very unique.

Performance limit increase

As a large-scale integrated electronic component manufacturer, TDK's products have an advantage, which is also a common advantage of many large Japanese companies, that is, forming a closed loop from upstream raw materials to downstream finished products. This relatively closed ecology produces the ultimate performance of components.

In terms of product-side performance, they may not always be technologically innovative, but under the iterative tempering of a closed ecosystem, the performance has almost reached the limit of this type of product. Just like TDK's Minicell series, the accuracy is extremely high in the temperature range of -25°C to +85°C, and the error is controlled within ±1%FS (full scale). For such a highly integrated pressure sensing, it is integrated in a package that is only 6 mm thick and has an area of only 24 x 26 mm.

The Minicell series is also quite reliable in harsh environments. Although the accuracy of the sensor IC will be slightly affected by the process, when the series is operated in the temperature range of -40°C to 140°C, the error over the entire temperature range is still no more than 1.5%FS. This nicely illustrates the above argument. Covering extreme temperatures, the full-scale error remains low. It can be seen that the performance is almost forced to the limit, which is also the limit of similar products. Also, most pressure sensor ICs do not support such a wide temperature range.

To compensate for nonlinearity and temperature errors, the MiniCell series integrates a signal conditioner and provides an accurate calibrated output signal. This is not a very new technology. To compensate for errors, many manufacturers will use this method. The MiniCell series exhibits extremely high immunity to electromagnetic interference (EMI) after compensation. Solve the problem of IC external radiation interference and prevent external electromagnetic wave interference, improve EMI capability as much as possible, and greatly improve IC accuracy. Final performance can only be achieved by careful inspection.

The ultimate in craftsmanship

Silicon Microstructures, Inc. (SMI), prior to its acquisition by TE, introduced a range of MEMS pressure sensor ICs that are particularly eye-catching in ultra-low and ultra-high pressure applications. After being acquired by TE, its products became the TE pressure sensing SMI series, which continued to make breakthroughs in ultra-low pressure and ultra-high pressure. If the previous series is that Japanese companies constantly temper their products in a closed ecology and push the performance to the limit, then the SMI series should be the ultimate display of technology, and the understanding and application of silicon microstructure should be unparalleled.

The SMI Series Low Pressure Series offers pressure ranges from 0.07-2.49PSI in gauge, differential or asymmetric differential pressure configurations. Combining a pressure sensor with a signal conditioning ASIC, the SMI family greatly simplifies the use of advanced silicon micromachined pressure sensors. This series has 16-bit I2C digital and analog output interfaces with different errors.

First, the temperature coverage is generally -20-85°C. Under the digital output, the full-scale total error does not exceed ±1%FS. At analog output, the error is higher at ±1.5% FS. This is because the series can be mounted directly on standard printed circuit boards and can obtain high level and calibrated pressure signals from the digital interface. So the error will also be lower. This approach also greatly reduces the need for custom correction algorithm compensation networks or microcontrollers.

In the process of silicon microstructuring, TE's SMI series can only be said to be too thorough, covering not only cost-sensitive micro-air pressure solutions, but also digital or analog output with high accuracy, temperature compensation or full calibration.

write at the end

The upgrade of smart factories is inseparable from automation equipment, and automation equipment is inseparable from various accurate sensors. In this fairly mature market, whether it is the strategy of approaching the performance to the extreme, or the gameplay of bringing the technology to the extreme, the pressure sensing of the first-class sensor manufacturers will bring their own strengths into full play.